Microelectronic assemblies with integrated circuits and interposers with cavities, and methods of manufacture

ABSTRACT

Semiconductor integrated circuits ( 110 ) or assemblies are disposed at least partially in cavities between two interposers ( 120 ). Conductive vias ( 204 M) pass through at least one of the interposers or at least through the interposer&#39;s substrate, and reach a semiconductor integrated circuit or an assembly. Other conductive vias ( 204 M. 1 ) pass at least partially through multiple interposers and are connected to conductive vias that reach, or are capacitively coupled to, a semiconductor IC or an assembly. Other features are also provided.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a division of U.S. patent application Ser.No. 14/328,380, filed Jul. 10, 2014, incorporated herein by reference.

BACKGROUND OF THE INVENTION

This document relates to semiconductor integrated circuits (ICs), andmore particularly to assemblies with semiconductor integrated circuits.

Multiple ICs can be combined in a high-density assembly to provideneeded functionality. High density is desired for small assembly sizeand also to shorten electrical paths as needed for high speed and lowpower consumption. However, a small IC is a fragile device with tiny,densely packed contact pads which must be connected to possibly largercontact pads of other integrated or non-integrated (discrete) circuits.To enable such connections, an intermediate IC (interposer) can beprovided. Interposers may also increase the mechanical strength of theassembly, absorb stresses generated due to differences in coefficientsof thermal expansion (CTE), and improve the ability to dissipate heatthat can be generated during operation or manufacture. However,interposers increase the assembly size and complexity, and they shouldbe as thin as possible to shorten the electrical connections through theinterposers.

FIG. 1 illustrates an exemplary assembly 102 with interposers asdescribed in U.S. pre-grant patent publication 2007/0235850 by Gerber etal., published Oct. 11, 2007, incorporated herein by reference. Theassembly is connected to external devices 104.2, 104.1 by large solderballs 108. The assembly includes ICs 110.1, 110.2 attached from thebottom to respective larger ICs (interposers) 120.1, 120.2. A typical ICis fabricated in a wafer, and an IC can occupy a whole wafer, but an ICcan also be part (“chip” or “die”) of a wafer. In FIG. 1, ICs 110 (i.e.110.1, 110.2) are dies attached to the interposers by connections 140which are smaller, and denser packed, than solder connections 108.Interposers 120 are thicker and wider than dies 110.

In regions not occupied by die 110.2, interposer 120.2 is connected tointerposer 120.1 by studs 154. In regions not occupied by die 110.1,interposer 120.1 is connected to an underlying insulator-based substrate160 by other studs 154.

Each interposer 120 includes interconnects 158 each of which goesthrough the interposer and interconnects the interposer's circuits (notshown) coupled to connections 108, 140, 154. Insulator-based substrate160 includes similar interconnects 164.

In manufacturing, ICs 110 and 120 and substrate 160 are separatelymanufactured and then attached to each other. Then the portion ofassembly 102 above the substrate 160 is covered by an encapsulant (e.g.molding compound) 180 to mechanically strengthen the assembly. Theassembly is then attached to external devices 104.

As noted above, it is desirable to reduce CTE mismatches, and thus theICs 110 and 120 and the encapsulant 180 should preferably be made ofmaterials with similar CTEs. However, a typical encapsulant (epoxy) hasa much higher CTE than many ICs based on semiconductor materials such assilicon, so there is a need to reduce the encapsulant amount while stillobtaining a robust assembly. Also, it is desirable to improve themechanical strength and heat dissipation of intermediate structuresobtained during manufacturing as well as the final structure.

SUMMARY

This section summarizes some features of the invention. Other featuresmay be described in the subsequent sections. The invention is defined bythe appended claims, which are incorporated into this section byreference.

Some manufacturing techniques described below reduce the assembly sizeand improve the mechanical strength and heat-dissipation capabilities ofIC assemblies and intermediate structures. For example, in someembodiments, the structure of FIG. 1 is modified by providing theinterposer 120.2 with a cavity on the bottom (shown as cavity 202.2 inFIG. 2), and the die 110.2 can be placed in the cavity; or the die canbe placed in a cavity 202.1 in the top surface of interposer 120.1; inFIG. 2, the die enters both cavities. Therefore, the interposers 120.1and 120.2 can be brought closer together, shortening the studs 154interconnecting the two interposers. The assembly size is reduced, andso is the amount of encapsulant 180 (the encapsulant amount can bereduced both in the absolute terms and in the relative terms, i.e.measured as a fraction of the assembly volume). The mechanical strengthis increased, partly because of the reduced size (and in particularshorter studs 154) and partly because a smaller fraction of the assemblyvolume is taken by the encapsulant which is softer than other parts ofthe assembly.

Due to the increased strength, it is easier to manufacture othercircuits on interposers 120.1 and 120.2 after their attachment to eachother and to dies 110.1 and 110.2. For example, in some embodiments,after the attachment, holes 204 are formed through the interposers 120.1and 120.2, or through part of the interposers (e.g. through theinterposers' substrates) to extend into the die 110.2, and conductivevias are formed in the holes. Then other ICs (such as 110.1 and 110.3)or IC assemblies are attached to the top surface of interposer 120.2 andthe bottom surface of interposer 120.1 and electrically connected to theconductive vias in holes 204. Further, in some embodiments, attachmentof dies 110.3 can be performed before dicing of interposers 120.1 and120.2, when the two interposers are still part of standard-size wafers:manufacturing is simplified when performed on standard-size structures.For example, circuit elements such as transistors, capacitors,interconnects, etc. (not shown) can be formed on interposer 120.2 beforeand/or after the attachment of IC 110.3. Of note, even though theinterposer 120.2 has a cavity on the bottom, the interposer's topsurface can be planar, facilitating fabrication of holes 204 and othercircuit elements and the attachment of IC 110.3.

In some embodiments, the die 110.2 has contact pads connected tointerposer 120.1. In some embodiments, the die 110.2 is placed in athrough-hole in interposer 120.2.

The invention is not limited to the features and advantages describedabove except as defined by the appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a vertical cross-section of assemblies includingintegrated circuits and constructed according to prior art.

FIGS. 2, 3A, 3B, 3C, 3D, 3E, 4A, 4B, 4C, 5A.1 illustrate verticalcross-sections of structures according to some embodiments as set forthin detail below.

FIGS. 5A.2 and 5A.3 are bottom views of horizontal cross sectionsaccording to some embodiments as set forth in detail below.

FIGS. 5B, 5C.1, 5C.2, 5D, 5E, 5F, 5G, 5H, 6, 7, 8, 9, 10, 11, 12, 13illustrate vertical cross-sections of structures according to someembodiments as set forth in detail below.

DESCRIPTION OF SOME EMBODIMENTS

The embodiments described in this section illustrate but do not limitthe invention. The invention is defined by the appended claims.

FIG. 3A shows the beginning stages of fabrication of an interposer 120.1according to some embodiments of the present invention. The beginningand other stages are similar to those described in U.S. patentapplication Ser. No. 14/214,365, filed Mar. 14, 2014 by InvensasCorporation, and U.S. provisional patent application No. 61/952,066,filed Mar. 12, 2014 by Shen et al., both incorporated herein byreference. The interposer substrate 120.15 is initially chosen to besufficiently thick to provide easy handling and adequate heatdissipation in fabrication. In some embodiments, substrate 120.15 is amonocrystalline silicon wafer of a 200 mm or 300 mm diameter and athickness of 650 micron or more. These materials and dimensions areexemplary and do not limit the invention. For example, substrate 120.15can be made of other semiconductor materials (e.g. gallium arsenide), orglass, or sapphire, or metal, or possibly other materials. Possiblematerials include NbTaN and LiTaN. The substrate will later be thinned;for example, in case of silicon, the final thickness could be 5 to 50microns. Again, these dimensions are not limiting.

Substrate 120.1S is patterned to form blind vias 224B (FIG. 3B). “Blind”means that the vias do not go through substrate 120.1S. This can bedone, for example, as follows for silicon substrates. First, optionallayer 310 (FIG. 3A) is formed on substrate 120.15 to protect thesubstrate and/or improve the adhesion of subsequently formed photoresist320. For example, layer 310 can be silicon dioxide formed by thermaloxidation, chemical vapor deposition (CVD), or sputtering. Thenphotoresist 320 is deposited and photolithographically patterned todefine the vias. Layer 310 and substrate 120.1S are etched in areasexposed by resist 320 to form the blind vias. The via depth is equal orslightly greater than the final depth of substrate 120.1S, e.g. 5 to 51microns for some silicon-substrate embodiments. The vias can be formedby a dry etch, e.g. dry reactive ion etching (DRIE). An exemplarydiameter of each via can be 60 microns or less, but other dimensions arepossible. The vias can be vertical (as shown) or may have slopedsidewalls. As noted above, the particular dimensions, processes andother features are illustrative and not limiting. For example, the viascan be laser-drilled or made by some other process.

The vias are then metallized. If substrate 120.1S is silicon, this canbe done as follows. Photoresist 320 and protective layer 310 areremoved, and a dielectric layer 324 (FIG. 3C) is formed on the entiretop surface of substrate 120.15. Dielectric 324 lines the via surfaces.In some embodiments, dielectric 324 is formed by thermal oxidation ofthe silicon substrate or by CVD or physical vapor deposition (PVD).Dielectric 324 will electrically insulate the substrate fromsubsequently formed metal in vias 224B. The dielectric thickness dependson the desired process parameters, and is 1 micron in an exemplarythermal-oxide embodiment (a thermal oxide is silicon dioxide formed bythermal oxidation). Other dimensions and materials can be used instead.Dielectric 324 can be omitted if substrate 120.15 is itself dielectric.

Then metal 224M (FIG. 3D) is formed in vias 224B over the dielectric324. In the embodiment shown, metal 224M fills up the vias, but in otherembodiments the metal is a liner on the via surfaces. In an exemplaryembodiment, metal 224M is electroplated copper. For example, a barrierlayer (metal or dielectric, not shown separately) is formed first ondielectric 324 to aid in copper adhesion and prevent copper diffusioninto the dielectric 324 or substrate 120.15. Suitable barrier layers mayinclude a layer of titanium-tungsten (see Kosenko et al., US pre-grantpatent publication 2012/0228778 published Sep. 13, 2012, incorporatedherein by reference), and/or nickel containing layers (Uzoh et al., US2013/0014978 published Jan. 17, 2013, incorporated herein by reference).Then a seed layer, e.g. copper, is formed on the barrier layer by PVD(possibly sputtering). Then copper is electroplated on the seed layer tofill the vias 224B and cover the whole substrate 120.15. The copper isthen removed from the areas between the vias by chemical mechanicalpolishing (CMP). Optionally, the CMP may also remove the barrier layer(if present) from these areas, and may stop on dielectric 324. As aresult, the copper and the barrier layer remain only in and over thevias 224B.

Bellow, numeral 224 can refer to the metallized vias. For ease ofdescription, we will refer to vias 224 as “metallized”, but non-metalconductive materials can also be used (e.g. doped polysilicon). Aconductive via (the feature formed of conductive material) 224M can beanalogized to a whole or part of an interconnect 158 of FIG. 2.

If layer 224M does not fill the vias but is only a liner on the viasurfaces, some other material (not shown) can be formed on layer 224M asa filler to fill the vias and provide a planar top surface for thewafer. This filler material can be polyimide deposited by spin coatingfor example.

Optionally, as shown in FIG. 3E, redistribution layer (RDL) 210.1 isformed on top of substrate 120.1S to provide contact pads 120.1C atdesired locations. The contact pads can later be attached to studs 154(FIG. 2), or to connections 140 attached to dies on top of theinterposer, or other types of connections (the interposer 120.1 of FIG.2 does not have dies attached to the top surface, but dies or multi-dieassemblies can be attached to the top surface if desired). Contact pads120.1C can also be attached to discrete wires connecting the interposerto other circuits. RDL 210.1 includes interconnect lines 216 insulatedfrom each other and from substrate 120.1S by the RDL's dielectric 220.Interconnect lines 216 can be thought of as parts of interconnects 158of FIG. 2. RDL 210.1 can be formed by prior art or other techniques. RDL210.1 is omitted if the contact pads 120.1C are provided by the topareas of metal 224M. In such a case, if substrate 120.15 is notdielectric, then a dielectric layer can be formed on the substrate andphotolithographically patterned to expose the contact pads 120.1C.

Interposer 120.1 may include transistors, resistors, capacitors, andother devices (not shown) in substrate 120.15 and redistribution layer210.1. These devices can be formed before, during and/or after thefabrication of vias 224 and RDL 210.1 using the process steps describedabove and/or additional process steps. Such fabrication techniques arewell known. See e.g. the U.S. Pat. No. 6,958,285 issued Oct. 25, 2005 toSiniaguine, and U.S. pre-grant patent publication 2012/0228778 byKosenko et al. published Sep. 13, 2012, both incorporated herein byreference.

Dies 110.1 are attached to interposer 120.1 and connected to contactpads 120.1C. More particularly, dies 110.1 have circuitry (not shown)electrically coupled to contact pads 110C, and the contact pads 110C areconnected to respective contact pads 120.1C by connections 140.1(possibly of the type described above for connections 140 or 154); theattachment can use prior art methods (e.g. as in FIG. 1) or othermethods (e.g. diffusion bonding); in case of diffusion bonding, theconnections 140.1 are not additional elements but are part of contactpads 110C and/or 120.1C. As shown in insert A, the dies may have contactpads 110C on top which are connected to contact pads 120.1C by discretewires 140.1; the wires can be attached by ultrasound bonding, or bysolder, or other methods. (Of note, studs 154 can also be formed asdiscrete wires, possibly of the type described in U.S. pre-grant patentpublication 2014/0036454 (Feb. 6, 2014, Caskey et al., entitled “BVAInterposer”, incorporated herein by reference.) The die-to-interposerattachment can be by dielectric adhesive for example.

Throughout this disclosure, dies 110.1 can be replaced by IC assembliessuch as, for example, the assembly 102 of FIG. 1 or 2; an entireassembly can be connected to contact pads 120.1C.

Optionally, an encapsulant (not shown) can be formed under the dies (asunderfill) and/or around the dies (to completely or partially cover thedies' sidewalls), and perhaps above the dies (to completely cover thedies' top and sidewall surfaces), possibly by prior art techniques (e.g.including molding and/or capillary action for underfill and/orpre-deposited underfill). The encapsulant can be any suitable material(e.g. epoxy with silica or other particles, or non-conducting film forthe underfill) or a combination of materials. No encapsulant is used insome embodiments. Other embodiments use an encapsulant, but therequirements for the encapsulant are relaxed because the assembly willbe strengthened by one or more other interposers closely positioned withrespect to interposer 120.1 (see FIG. 2 for example). In someembodiments, the encapsulant is provided only underneath the dies (asunderfill), i.e. only between the dies and substrate 120.1S (around theconnections 140.1).

In the embodiment being described, interposer 120.1 does not have anycavities (such as cavity 202.1 in FIG. 2), but one or more cavities canbe provided, possibly by known techniques, as illustrated immediatelybelow on the example of interposer 120.2 (FIGS. 4A-4C).

Just like interposer 120.1, interposer 120.2 may be provided withcircuits including transistors, resistors, capacitors, and/or otherelements. Circuitry can be manufactured in interposer 120.2 beforeand/or after the attachment to interposer 120.1.

Interposer 120.2 should be sufficiently rigid to facilitate subsequenthandling of the assembly as explained below. In the embodiment shown,interposer 120.2 includes monocrystalline silicon substrate 120.2S of athickness 650 microns or higher. Other materials (e.g. glass, metal,polymer plastic, and others) and thicknesses are possible, based on anyfactors that may be important (including the availability of materialsand processes). One possible factor is reducing the mismatch of thecoefficients of thermal expansion (CTE) between substrates 120.2S and120.1S: if substrate 120.1S is silicon, then substrate 120.2S could besilicon or another material with a similar CTE. Another factor isreducing the CTE mismatch between interposer 120.2 and dies 110.1(especially if the dies may physically contact the interposer 120.2 ormay be attached to interposer 120.2). The choice of materials can alsobe affected by the type of circuitry that must be provided in interposer120.2.

Another possible factor is high thermal conductivity to better enablethe interposer 120.2 to conduct heat to the ambient. For example, metalmay be appropriate.

Openings 202.2 (FIG. 4C) are cavities formed in interposer 120.2 tomatch the size and position of dies 110.1. An exemplary process is asfollows (this process is appropriate for a silicon substrate 120.2S, andmay be inappropriate for other materials; known processes can be usedfor silicon or other materials). First, an auxiliary layer 420 (FIG. 4A)is formed to cover the substrate 120.2S for protection or for improvedadhesion of subsequently formed photoresist 430. Resist 430 is thendeposited and patterned photolithographically to define the cavities202.2. Auxiliary layer 420 exposed by the resist openings is etchedaway. Then (FIG. 4B) substrate 120.2S is etched in these openings toform cavities 202.2 with sloped, upward-expanding sidewalls (e.g. by awet etch). The cavity depth depends on the thickness of dies 202.2 andconnections 140.1 as explained below. Non-sloped (vertical) sidewallscan also be obtained, by an anisotropic dry etch for example. Retrogradesidewalls or other sidewall profiles are also possible.

Then photoresist 430 is removed (FIG. 4C). In the example shown,auxiliary layer 420 is also removed, but in other embodiments layer 420remains in the final structure.

Optionally, a dielectric 434, e.g. silicon dioxide or polyimide, isformed to cover the substrate surface by any suitable techniques (e.g.sputtering, or thermal oxidation if substrate 120.2S is silicon).

As shown in FIG. 5A.1, interposer 120.2 is attached to interposer 120.1;each die 110.1 fits into a respective cavity 202.2. More particularly,legs 120.2L of interposer 120.2 are attached to the top surface ofinterposer 120.1 (e.g. to RDL 210.1 if the RDL is present; legs 120.2Lare those portion(s) of interposer 120.2 that surround the cavities).The interposer attachment is shown as direct bonding, but other types ofattachments (e.g. by adhesive) can also be used. The entire assembly ismarked with numeral 504.

In this embodiment, the interposers are attached without beingelectrically interconnected, and in fact no circuitry has beenmanufactured in interposer 120.2 at this stage. In other embodiments,circuitry has been manufactured in interposer 120.2, possibly withcontact pads in legs 120.2L, and these contact pads can be connected tocontact pads in interposer 120.1 with studs 154 of FIG. 2 or other typesof connections (possibly using solder, diffusion bonding, or othertypes).

In FIG. 5A.1, the dies' top surfaces physically contact the top surfacesof cavities 202.2 (i.e. the layer 434), and the dies may be bonded tolayer 434 by direct bonding. Alternatively, the bonding can be byadhesive; the adhesive can be dielectric or anisotropic so as not toshort together the subsequently formed conductive vias in holes 204 (seeFIG. 2). Alternatively, conductive adhesive can be used if it is limitedto the vicinity of holes 204 so as not to short together the conductivevias.

Bonding of dies 110.1 to the cavity surfaces increases the bondingstrength between the interposers 120.1, 120.2 and improves the thermalconductivity of the thermal path from the dies to interposer 120.2.

As noted above, in some embodiments the dies are underfilled and/orencapsulated from above by a suitable protective material (not shown inFIG. 5A.1), e.g. the same material as in encapsulant 180 in FIG. 1. Incase of encapsulation from above, the cured encapsulant may be a solidmaterial (possibly thermosetting) physically contacting the top surfacesof cavities 202.2. The encapsulant may be bonded to the cavity surfacesas described above, with benefits similar to those described above forthe no-encapsulant embodiments.

In some embodiments, the cavities 202.2 are of uniform depth, and thetop surfaces of the dies (or encapsulant) may be provided with uniformheight. To improve the height uniformity, the dies (or encapsulant) canbe polished before joining of interposer 120.2 to interposer 120.1.Suitable polishing processes include lapping, grinding, and chemicalmechanical polishing (CMP). Also, temperature interface material (TIM,not shown here but shown at 525 in FIGS. 5A.2 and 5A.3 discussed below)can be placed in the cavities to improve thermal transfer between thedies and interposer 120.2. TIM's thermal conductivity can usually behigher than that of air. Exemplary TIMs are those that exist insemisolid, gel-like (grease-like) state throughout the range of expectedoperating temperatures (e.g. 0° C. to 200° C. for some assemblies) or atleast when the temperatures are high to make die cooling particularlydesirable (20° C. to 200° C. for some assemblies). The gel-likematerials fill free spaces between the dies and interposer 120.2 toprovide a thermally conductive path away from the dies. An exemplary TIMmaterial is a thermal grease available from Arctic Silver, Inc. (havingan office in California, USA); the grease's thermal conductivity is 1W/mK.

In some embodiments, substrate 120.2S and/or layer 434 is soft andcapable to deform to accommodate the height variations in dies 110.1. Insome embodiments, possibly before the dies are attached to theinterposer 120.1, the dies' surfaces (top surfaces in FIG. 5A.1) areprovided with a soft dielectric layer (not shown, possibly polyimide orepoxy or other polymer) to facilitate fitting the dies to cavities 202.2in view of height variations. In some embodiments, a semisolid materialsuch as resin is used, which is cured after the interposer-to-interposerattachment. In some embodiments, a soft dielectric (not shown) is formedon the top surface of interposer 120.1 and dies 110.1 after the dieattachment to the interposer, at the stage of FIG. 3E, and is possiblypolished.

FIG. 5A.2 shows a possible bottom view of the horizontal cross sectionpassing through the dies of the structure of FIG. 5A.1 (only half of thecross section is shown, with just one cavity). In the example of FIG.5A.2, the dies are surrounded by thermal interface material (TIM) 525.The legs 120.2L form a region completely surrounding each cavity, andthe interposer 120.1 area bonded to the legs also completely surroundseach cavity.

FIG. 5A.3 shows another possible bottom view of the same horizontalcross section, also with TIM 525. In this example, the legs 120.2L areprovided only on two opposite sides of each cavity (left and rightsides) but are not provided above and below. Each cavity 202.2 is ahorizontal groove in substrate 120.2S, containing possibly other dies(any cavity 202.2 may also have only one die). The groove may runthrough the entire substrate 120.2S. Other cavity shapes are alsopossible.

After the bonding of interposer 120.2 to interposer 120.1, interposer120.2 is optionally thinned from the top; see FIG. 5B. The thinning canbe performed by chemical etching, mechanical grinding, a combination ofthe two (e.g. chemical mechanical polishing), or possibly otherprocesses. In some embodiments, the initially thickness of interposer120.2S made of silicon is 2 to 1000 microns (e.g. 650 to 750 microns),the cavity depth is 1 to 998 microns, and the final thickness ofinterposer substrate 120.2S above the cavities is 1 to 999 microns.These dimensions are for illustration only and are not limiting. Ofnote, the structure remains strong due in part to the high thickness ofinterposer 120.1 (this interposer will be thinned later).

In some embodiments, the top surface of interposer 120.2 remains planar.Interposers 120.1 and 120.2 have not been diced, so the lateral shape ofthe assembly can be the same as of a standard wafer. These particularsare not limiting.

Now additional circuits (not shown) can be fabricated on top ofinterposer 120.2 and connected to dies 110.1 and/or interposer 120.1 byconductive vias passing through holes 204 (see FIGS. 2 and 5C.1). Holes204 can be formed using known techniques, e.g. laser drilling oretching, or laser drilling followed by etching, or other processes. Ifetching is used and an etch mask is desired, the etch mask (not shown)can be formed using photoresist by known techniques. The holes 204 mayterminate at any desired point, and different holes may have differentdepths; some examples are illustrated in FIG. 5C.2 showing a die 110.1on a larger scale. In this example, the die has a semiconductorsubstrate 1105 (e.g. monocrystalline silicon) and conductive anddielectric layers 110CD formed on the substrate's bottom surface andproviding the contact pads 110C. The die may include transistors,resistors, and other kinds of circuit elements. Hole 204.1 terminates ata contact pad 110C. Hole 204.2 terminates at some other conductor orsemiconductor feature 510.1 in layers 110CD. Hole 204.3 terminates at afeature 510.2 in substrate 1105. For example, feature 510.2 may be atransistor source or drain region or a trench formed in substrate 1105and filled with a conductive material, possibly metal, possiblyinsulated from substrate 1105 by a dielectric layer (not shown).

Feature 510.3 is a metallized via formed through substrate 110S, andhole 204.4 terminates at the via, i.e. at the top surface of die 110.1.Hole 204.5 terminates above the feature 510.5 to provide capacitivecoupling to the feature as described below. While the holes are shownabove the respective features, a hole may also be on a side of arespective feature, to provide electrical coupling from the side. Theseexamples are not limiting.

As shown in FIG. 5D (same view as in FIG. 5C.2 but without solder 140.1and some of the contact pads 110C), conductive vias 204M are formed inholes 204. In some embodiments, conductive vias 204M are made by thesame or similar process as described above for vias 224M. For example,dielectric 514 can be deposited over the sidewalls of holes 204. (Anexemplary, not limiting process is chemical vapor deposition orsputtering of silicon dioxide, followed by removal of dielectric 514from the hole bottoms, e.g. by a masked etch or an unmasked verticaletch, to expose the features 510; the dielectric does not have to beremoved if the feature will not be exposed—note feature 510.5). Then aconductor 204M, e.g. metal, is formed to physically contact or becapacitively coupled to the adjacent (e.g. underlying) features 510 andfill up the holes 204 (in some embodiments, conductor 204M iselectroplated copper, but other metal or non-metal conductors andprocesses can be used). In other embodiments, conductor 204M lines thehole surfaces but does not fill up the holes; the holes can be filled upby another filler. If the conductor was deposited outside of holes 204,and the conductor is not desired outside the holes, the conductor can beremoved outside the holes, by CMP or an etch for example. In someembodiments, the conductor is patterned outside the holes to provideinterconnects or other circuit elements.

Dielectric 514 is omitted from subsequent drawings for simplicity.

Then dies 110.2 (FIG. 5E) are attached to interposer 120.2, possibly ina manner similar to the attachment of dies 110.1 to interposer 120.1(see FIG. 3E). Before the die attachment, any desired type of circuitrycan be formed at the top of interposer 120.2. In the example of FIG. 5E,an optional RDL 120.2 is added to interposer 120.2 in a manner similarto RDL 120.1; the RDL 120.2 provides contact pads 120.2C on top ofinterposer 120.2, and provides conductive lines which interconnect thecontact pads and the conductive vias 204M in a desired pattern. The RDL120.2 is optional as the contact pads can be provided by conductive vias204M.

The contact pads at the top of interposer 120.2 are connected to contactpads 110C of dies 110.2 by connections 140.2, which can be solder,adhesive, possibly using diffusion bonding or discrete wires or othertechniques, as described above for connections 140, 140.1, 108, 154.Dies 110.2 do not have to be vertically aligned with dies 110.1.

Dies 110.2 can optionally be underfilled and/or encapsulated from above.

As illustrated in FIG. 5F, the process of FIGS. 4A-5E can be repeatedany number of times to attach any number of die-on-interposer structuresto interposer 120.2. In the example of FIG. 5F, interposer 120.3 isbonded to interposer 120.2 and can accommodate the dies 110.2 in itscavities 202.3. Alternatively, cavities can be provided in the topsurface of interposer 120.2 to accommodate the dies 110.3 in whole or inpart, or both interposers 120.2 and 120.3 may have cavities enclosingthe dies as in FIG. 2.

Then conductive vias 204M are formed in interposer 120.3 to reach andpossibly partially penetrate the dies 110.2, and other dies 110.3 areattached to interposer 120.3 so as to be electrically coupled to vias204M (possibly through RDL 210.3 optionally formed on top of interposer120.3, and/or through other circuits; FIG. 5F does not show theinterconnects in RDL 210.3 for simplicity). The attachment andinterconnection can be as for dies 110.1 (FIG. 3E). Another interposer120.4 is attached on top to accommodate the dies in its cavities 202.4,and so on. The process can stop after the attachment of the lastinterposer 120.i (i=4 in FIG. 5F), or the last interposer can beomitted, i.e. the process can stop without an interposer over the topdies 110 (the dies may or may not be underfilled and/or encapsulatedfrom above by epoxy or some other molding or non-molding compound).

In some embodiments, different interposers have different thickness,e.g. the top interposer may be thicker than the underlying interposers.The thickness of each interposer is defined as a function of desiredproperties, such as rigidity, resistance to warpage, heat dissipation,and assembly size.

At any stage, possibly after the stage of FIG. 5F, the interposer 120.1can be thinned from the bottom to expose the metal 224M (FIG. 5G). Thethinning involves partial removal of substrate 120.1S and dielectric 324(if the dielectric is present). The thinning may be performed by knowntechniques (e.g. mechanical grinding or lapping of substrate 120.1Sfollowed by dry or wet, masked or unmasked etch of substrate 120.1S anddielectric 324; the substrate and the dielectric are etchedsimultaneously in some embodiments.) In some embodiments, dielectric 324protrudes out of substrate 120.1S around metal 224M at the end of thethinning operation, and metal 224M protrudes out of the dielectric. Seefor example the aforementioned U.S. Pat. No. 6,958,285. As noted above,the invention is not limited to particular processes.

In some embodiments, even though the interposer 120.1 is reduced inthickness, the interposer 120.1 is kept flat by overlying interposer120.2 and by higher interposers if present, so the handling of theassembly 504 is facilitated. The overlying interposer(s) 120 alsoimprove mechanical integrity (e.g. increase rigidity and weight) tofurther facilitate handling of the assembly. Also, the overlyinginterposers 120 help absorb and dissipate the heat generated during thisand subsequent fabrication stages and in subsequent operation ofassembly 504. The final thickness of substrate 120.1S can therefore bevery low, e.g. 50 microns or even 5 microns or less. The same is truefor the overlying interposers, or at least for the interposer portionsat the cavities (above the dies). Hence, vias 204M and blind vias 224B(FIG. 3B) can be shallow. The shallow depth facilitates fabrication ofthe metallized vias (i.e. facilitates the via etch and subsequentdeposition of dielectric and metal into the vias). The shallow depthalso shortens the signal paths through the vias. Moreover, if the viasare short, each via can be narrower while still allowing reliabledielectric and metal deposition. The via pitch can therefore be reduced.

Subsequent process steps depend on the particular application. In someembodiments (FIG. 5H), RDL 210.B and/or other circuits are formed on thebottom of substrate 120.1S, possibly using the same techniques as forthe RDLs and circuits on top of interposers. RDL 210.B provides contactpads 120.CB and connects them to metal 224M. (If the RDL is omitted, thecontact pads are provided by metal 224M and/or other circuit elements).If desired, the assembly 504 can be diced into stacks (dies) 504S alongdicing lines such as 520. Then the dies 504S, or the entire assembly 504if dicing is omitted, can be attached and connected to other structuresand or external devices, such as substrate 160 (e.g. a printed wiringsubstrate) and devices 104 in FIG. 2. The attachment uses connections140.2 that can be solder or other types described above for connections140 and 154. These details are not limiting.

Many variations are possible. The dies 110 on top of any interposer donot have to be aligned with the dies on any interposer above or below;therefore, the cavities enclosing a die on any interposer do not have tobe aligned with any other cavities.

FIG. 6 shows a part of a similar cross section as in FIG. 5E, withconductive vias 204M-1 and 204M-2 passing through all or part of RDL210.2. Any conductive via 204M may pass through all or part of acorresponding RDL, and may be formed after formation of all or part ofthe RDL.

FIG. 7 illustrates a variation at the stage of FIG. 5G; as illustrated,a conductive via 204M (such as 204M.1 in FIG. 7) passes through multipleinterposers (all the interposers 120.1 through 120.3 and partiallythrough interposer 120.1 in FIG. 7). The via may physically contact, andelectrically interconnect, any number of conductive of other features inthe interposers. In FIG. 7, the via 204M.1 reaches each RDL 210 and isconnected by the RDL's interconnects both to some of the RDL's contactpads attached to the overlying dies 110 and to some vias 204M or 224Mthat reach the RDL. Of note, the same die 110 can be connected to via204M.1 from above—through via 204M entering the die, and frombelow—through the die's contact pads 110C. If a die is replaced by amulti-die module, the module can be connected from above and below; forexample, the module's top die can be connected to via 204M from above,and the bottom die from below. This architecture is highly suitable forsome types of circuits. One type is a memory cube: some of dies 110 canbe memory or dies, and vias like 204M.1 can serve as TSVs(through-substrate vias) to connect the memory and logic to each other.The memory access terminals can be in interposer 120.1 or in circuitsattached below the interposer, or the memory access terminals can beprovided by a circuit (not shown) in the top interposer (such as 120.4),possibly on top of the top interposer, or by circuits formed above thetop interposer. Some memory cubes are described for example in “HybridMemory Cube Specification 1.0”, Hybrid Memory Cube Consortium, 2013, andU.S. Pat. No. 8,397,013 (Mar. 12, 2013, Rosenband et al.), bothincorporated herein by reference.

It is assumed that dicing lines will not pass through vias 204M.1.Alternatively, the dicing dies may or may not pass through the vias; forexample, a via 204M.1 can be used to test the structure before dicing,and/or to provide an interconnect which after dicing is located on aside of a die 504S.

In FIG. 8 shows another variation at the same stage as FIG. 7: a via204M.1 passes through interposer 120.4 between the cavities 202.4 andenters a cavity 202.3 and die 110.3 in the cavity to interconnect afeature or features (not shown) in the die to another feature orfeatures (not shown) in RDL 210.3 or interposer 120.4.

Some vias 204M may serve just as heat sinks, possibly having noelectrical functionality. FIG. 9 shows an example (at the same stage asFIG. 8) with such vias 204M.1, 204M.2. Via 204M.1 passes throughinterposer 120.4 and partially through a die 110.3 in cavity 202.4. Vias204M.2 pass partway through interposer 120.4 and do not reach theinterposer's cavities. Such vias can be present at any level, i.e. inany interposer; for example, they can be placed next to, and/or inside,a die which is expected to generate much heat (e.g. a microprocessordie).

FIG. 10 shows another variation: RDL 210.4 is added on top of the upperinterposer 120.4. The RDL provides top contact pads 120.CT that can beconnected to other IC assemblies or discrete devices, using for exampleconnections 140.T that can be of any type described above forconnections 140 and 154. Vias 204M pass through the interposer 120.4 andpartially through dies in interposer cavities 202.4 as in otherembodiments described above.

Further, the assembly includes a reinforcement frame (stiffener frame)1010. Reinforcement frame 1010 is similar to an interposer but hasthrough holes 202.4′ in place of cavities; dies 110.3 are located inthrough holes 202.4′ and may extend up into respective cavities 202.4.Due to the reinforcement frame, the cavities 202.4 can be shallower. Ofnote, the reinforcement frame 1010 does not need a layer like dielectric434.

Through holes 202.4′ may or may not be vertically aligned with cavities202.4; see for example FIG. 11 which is similar to FIG. 10 butinterposer 120.4 does not have a cavity over one of through-holes202.4′; this through hole has multiple dies one of which is penetratedby a via 204M.1 passing through the substrate of interposer 120.4.

Features described above can be used separately or in any combination.For example, the top RDL 210.4 with the top contact pads 120.CT can beprovided in any of the embodiments of FIGS. 5H through 9. Also,reinforcement frame 1010 can be omitted in the embodiment of FIG. 10 or11, and/or can be provided at any level: any number of reinforcementframes can be stacked between any two adjacent interposers and/or abovethe top interposer in any of the embodiments of FIGS. 5H through 11.Also, the conductive vias 204M of any figure can be present the otherembodiments of other figures at any level. Other features can besimilarly combined or omitted.

As illustrated in FIG. 2, an interposer such as 120.2 may include a die(such as 110.2) attached to the interposer's bottom surface: the die hascontact pads on top (similar to 110C in FIG. 10) that are connected tocontact pads (not shown) on the bottom of interposer 120.2 in cavity202.2. A metallized via 204 can be made in the interposer's (orinterposer's substrate's) top surface before or after the interposerattachment to interposer 120.1 (we use the numeral 204 for either a holeor a conductive via 204M in the hole. Advantageously, the conductive via204 (or even the hole) can be formed after the interposer-to-interposerattachment, when the assembly is mechanically stronger and more capableto dissipate heat. The via can pass through part of die 110.2 andconnect circuitry on top of interposer 120.2 to a circuit feature in die110.2. Another metallized via 204 can be made in the bottom surface ofinterposer 120.1 or the interposer's substrate (not shown separately)using similar techniques and may reach or even enter die 110.2 to beelectrically coupled to the die's circuitry (not shown).

Further, the die 110.2 can be replaced by an assembly, and the same istrue for all dies 110 described above. See FIG. 12 which is similar toFIG. 2 but die 110.2 is replaced by a stack of three dies 110.2′,110.2″, 110.3′″ of different dimensions. Die 110.2′ has its top contactpads attached to contact pads of interposer 120.2 in cavity 202.2; die110.2″ has its top contact pads attached to bottom contact pads of die110.2′; die 110.2′″ has its top contact pads attached to bottom contactpads of die 110.2″. In addition, die 110.2″ has a bottom contact padattached to a top contact pad of interposer 120.1 by a connection 140.1.Die 110.2″ also has a top contact pad attached to a bottom contact padof interposer 120.2 outside of cavity 202.2 by a stud 154.1. Stud 154.1can be, for example, as described above, or as described in U.S.pre-grant patent publication 2014/0036454 (Feb. 6, 2014, Caskey et al.,entitled “BVA Interposer”, incorporated herein by reference), or can besome other kind of connection.

Die 110.2′″ is located in cavity 202.1 of interposer 120.1, and may havebottom contact pads connected to those of interposer 120.1 (this is notshown).

Vias 204 is as in FIG. 2, and can be structurally and/or functionallysimilar similarly to any via 204M described above. Bottom via 204 entersmultiple dies 110.2″, 110.2′″; the same is true for other architecturesdescribed above: a via 204 may pass through and enter any number of diesand be electrically coupled to circuitry in multiple dies in all or someof the dies that the via enters.

FIG. 13 is like FIG. 12 but shows a via 204 passing through all thethree dies 110.2′, 110.2″, 110.2′″ and both interposers 120.1, 120.2.The via passes through the cavities 202.1 and 202.2.

Some embodiments include methods and structures defined by the followingclauses:

Clause 1 defines method for fabricating a microelectronic assembly, themethod comprising:

obtaining a first structure (e.g. as in FIG. 2 or 5B or 12 or otherfigures) comprising:

-   -   a plurality of interposers (e.g. 120.1, 120.2) overlying one        another and comprising a first interposer (e.g. 120.1 in FIG. 5B        or 120.2 in FIG. 2) and a second interposer (e.g. 120.2 in FIG.        5B or 120.1 in FIG. 2), each of the first and second interposers        comprising a first side facing the other one of the first and        second interposers and comprising a second side opposite to the        first side, wherein at least the first interposer comprises one        or more first contact pads at its first side (e.g. on top of RDL        210.1 in FIG. 5B or on the bottom of interposer 120.2 in FIG.        2);    -   one or more first modules (e.g. dies or other assemblies 110.1        in FIG. 5B or 110.2 in FIG. 2 or 110.2′+110.2″+110.2″ in        FIG. 12) attached to the first interposer between the first and        second interposers, at least one first module comprising a        semiconductor integrated circuit and comprising one or more        contact pads electrically coupled to the integrated circuit and        to at least one first contact pad (a die may contain circuitry        electrically coupled to the die's contact pads); and

wherein at least one of the first and second interposers comprises oneor more first cavities (e.g. 202.2), and at least part of each firstmodule is located in a respective first cavity; and

after obtaining the first structure, forming one or more firstconductive vias (e.g. 204M) each of which passes through at least partof at least one of the first and second interposers to reach at leastone respective first cavity and to physically contact, or becapacitively coupled to, circuitry of at least one respective firstmodule at least partially located in the respective first cavity (suchas any via 204M in FIG. 5D for example).

Clause 2 defines the method of clause 1 wherein at least one firstconductive via enters at least one respective first module(alternatively, the via may terminate at the surface of a first modulewithout entering the first module).

Clause 3 defines the method of any preceding clause wherein at least onefirst conductive via enters a semiconductor substrate of at least onesemiconductor integrated circuit of at least one first module.

Clause 4 defines the method of any preceding clause wherein at least onefirst conductive via passes through a semiconductor substrate of atleast one semiconductor integrated circuit of at least one first module.

Clause 5 defines the method of any preceding clause wherein at least onefirst conductive via passes through at least part of each of the firstand second interposers and through the respective first cavity.

Clause 6 defines the method of any preceding clause wherein at least onefirst conductive via passes through at least part of the secondinterposer (e.g. through substrate 120.2S of interposer 120.2 in FIG.5D) and enters at least one respective first module.

Of note, in a variation of FIG. 2, an additional via 204M (not shown)can pass through the substrate of interposer 120.1 into cavity 202.1 andcan enter the die 110.2.

Clause 7 defines the method of any preceding clause further comprising,after forming the one or more first conductive vias, attaching a secondmodule (e.g. a die or module 1110.2 in FIG. 5E) to the secondinterposer's second side to electrically couple circuitry in the secondmodule to at least one first conductive via which passes through atleast part of the second interposer to enter a first module andelectrically couple circuitry in the first module to circuitry in thesecond module.

Clause 8 defines the method of any preceding clause wherein each firstconductive via is formed in a respective first hole (e.g. 204 in FIG.5C.1) formed after obtaining the first structure.

Clause 9 defines the method of any preceding clause further comprising:

forming one or more second holes (e.g. for thermal vias 204M.1 or 204M.2in FIG. 9) each of which passes at least partially through at least oneof the first and second interposers;

forming thermally conductive material in each second hole, the thermallyconductive material having a higher thermal conductivity than at leastone of the first and second interposers' portions which contains atleast part of the second hole, the thermally conductive material havingno electrical functionality. (For example, the thermally conductivematerial can be metal.)

Clause 10 defines the method of any preceding clause further comprisingforming one or more second conductive vias (such as 204M.1 in FIG. 7)each of which at least partially passes through a set of two or more ofthe interposers (all the interposers in FIG. 7).

Clause 11 defines the method of clause 10 wherein at least one secondconductive via is electrically coupled to first conductive vias passingthrough at least parts of at least two of the interposers of the set.

Clause 12 defines the method of clause 10 or 11 wherein at least onesecond conductive via is formed after obtaining the first structure. (Insome embodiments, the holes for the vias can be formed after obtainingthe first structure such as shown in FIG. 5B, or can at least partiallybe formed at an earlier stage; for the example, the hole portionspassing through substrate 120.2S can be formed before theinterposer-to-interposer bonding.)

Clause 13 defines the method of any preceding clause wherein eachinterposer has a substrate, and each first conductive via passes throughthe respective interposer's substrate.

Clause 14 defines the method of clause 13 wherein each substrate is asemiconductor substrate.

Clause 15 defines a microelectronic assembly comprising:

a plurality of interposers overlying one another and comprising a set ofat least two interposers each of which comprises one or more firstcontact pads;

a plurality of first modules each of which is attached to at least oneof the interposers and comprises a respective semiconductor integratedcircuit and one or more contact pads each of which is electricallycoupled to the integrated circuit and connected to a respective firstcontact pad, wherein each interposer in the set has a first contact padconnected to a contact pad of a first module;

wherein at least one of the interposers comprises one or more firstcavities, and at least part of each first module is located in at leastone respective first cavity;

wherein the microelectronic assembly further comprises:

one or more first conductive vias each of which passes through at leastpart of at least respective one of the interposers and reaches at leastone respective first cavity and physically contacts, or is capacitivelycoupled to, circuitry of at least one respective first module at leastpartially located in the respective first cavity;

one or more second conductive vias (for example, 204M.1 in FIG. 7) eachof which has a segment which at least partially passes through at leastrespective two of the interposers outside of any first cavity which haverespective first conductive vias (e.g. other vias 204M in FIG. 7)electrically coupled to the segment.

Clause 16 defines the microelectronic assembly of claim 15 wherein forat least one second conductive via, the respective first conductive viasare electrically coupled to said segment of the second conductive via.

Clause 17 defines the microelectronic assembly or method of anypreceding clause wherein each interposer has a substrate, and each firstconductive via passes through the respective interposer's substrate.

Clause 18 defines the microelectronic assembly of clause 17 wherein eachsubstrate is a semiconductor substrate.

Clause 19 defines the microelectronic assembly or method of anypreceding clause wherein at least one first conductive via enters asemiconductor substrate of at least one semiconductor integrated circuitof at least one first module.

Clause 20 defines the microelectronic assembly or method of anypreceding clause wherein at least one first conductive via passesthrough a semiconductor substrate of at least one semiconductorintegrated circuit of at least one first module.

Clause 21 defines the method or microelectronic assembly of anypreceding clause wherein each conductive via extends along a verticalaxis which is an imaginary line passing through the via.

Clause 22 defines the method or microelectronic assembly of anypreceding clause wherein at least one first conductive via enters atleast one respective first module.

The invention is not limited to the embodiments described above. Otherembodiments and variations are within the scope of the invention, asdefined by the appended claims.

The invention claimed is:
 1. A microelectronic assembly comprising: aplurality of interposers overlying one another and comprising a set ofat least two interposers each of which comprises one or more firstcontact pads; a plurality of first modules each of which is attached toat least one of the interposers and comprises a respective semiconductorintegrated circuit and one or more contact pads each of which iselectrically coupled to the integrated circuit and connected to arespective first contact pad, wherein each interposer in the set has afirst contact pad connected to a contact pad of a first module; whereinat least one of the interposers comprises one or more first cavities,and at least part of each first module is located in at least onerespective first cavity; wherein the microelectronic assembly furthercomprises: one or more first conductive vias each of which passesthrough at least part of at least respective one of the interposers andreaches at least one respective first cavity and physically contacts, oris capacitively coupled to, circuitry of at least one respective firstmodule at least partially located in the respective first cavity; one ormore second conductive vias each of which has a segment which at leastpartially passes through at least respective two of the interposersoutside of any first cavity which have respective first conductive vias.2. The microelectronic assembly of claim 1 wherein for at least onesecond conductive via, the respective first conductive vias areelectrically coupled to said segment of the second conductive via. 3.The microelectronic assembly of claim 1 wherein each interposer has asubstrate, and each first conductive via passes through the respectiveinterposer's substrate.
 4. The microelectronic assembly of claim 3wherein each substrate is a semiconductor substrate.
 5. Themicroelectronic assembly of claim 1 wherein at least one firstconductive via enters a semiconductor substrate of at least onesemiconductor integrated circuit of at least one first module.
 6. Themicroelectronic assembly of claim 1 wherein at least one firstconductive via passes through a semiconductor substrate of at least onesemiconductor integrated circuit of at least one first module.
 7. Themicroelectronic assembly of claim 1 wherein each via of the first andsecond conductive vias extends along a vertical axis which is animaginary line passing through the via.
 8. The microelectronic assemblyof claim 1 wherein at least one first conductive via enters at least onerespective first module.
 9. A microelectronic assembly comprising: aplurality of interposers overlying one another, each interposercomprising one or more first contact pads; a plurality of first moduleseach of which is attached to at least one of the interposers andcomprises a respective semiconductor integrated circuit and one or morecontact pads each of which is electrically coupled to the integratedcircuit and connected to a respective first contact pad, wherein atleast one said interposer has a first contact pad connected to a contactpad of a first module; wherein at least one of the interposers comprisesone or more first cavities, each first cavity being located between twoof the interposers, and at least part of each first module is located inat least one respective first cavity; wherein the microelectronicassembly further comprises one or more first conductive vias, each firstconductive via extending along a vertical axis which is an imaginaryline passing through the via, each first conductive via passing throughat least part of at least one respective interposer and reaching arespective first cavity and physically contacting, or being capacitivelycoupled to, circuitry of at least one respective first module at leastpartially located in the respective first cavity.
 10. Themicroelectronic assembly of claim 9 wherein at least one firstconductive via passes through a substrate of at least one respectiveinterposer bounding the respective first cavity.
 11. The microelectronicassembly of claim 10 wherein the substrate of the at least onerespective interposer is a semiconductor substrate.
 12. Themicroelectronic assembly of claim 10 wherein at least one firstconductive via enters a semiconductor substrate of at least onesemiconductor integrated circuit of at least one respective first moduleon a first side of the respective first module, and the respective firstmodule has one or more contact pads on a second side opposite from thefirst side.
 13. The microelectronic assembly of claim 12 wherein said atleast one first conductive via has a first end in the semiconductorsubstrate of said at least one semiconductor integrated circuit of thefirst module and has another end at a contact pad of the microelectronicassembly.